"Simulation study of SU-8 structures realized by single-step projection ..."

Katsuo Nakamura et al. (2016)

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DOI: 10.1109/ICSENS.2016.7808444

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-13

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Katsuo Nakamura, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata, Florian Larramendy, Oliver Paul:
Simulation study of SU-8 structures realized by single-step projection photolithography. IEEE SENSORS 2016: 1-3

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