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"Smoothing the way towards miniaturized MEMS AlN-based piezoelectric ..."

Guido Sordo et al. (2017)

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DOI: 10.1109/ICSENS.2017.8234391

access: closed

type: Conference or Workshop Paper

metadata version: 2023-02-12

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Guido Sordo, Jacopo Iannacci, Michael Schneider, Ulrich Schmid, Antonio Camarda, Marco Tartagni, Aldo Romani:
Smoothing the way towards miniaturized MEMS AlN-based piezoelectric transformers. IEEE SENSORS 2017: 1-3

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