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"Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash."
S. Rachidi et al. (2024)
- S. Rachidi, S. Ramesh, Davide Tierno, G. L. Donadio, A. Pacco, J. W. Maes, Y. Jeong, Antonio Arreghini, Geert Van den Bosch, Maarten Rosmeulen:
Pure-Metal Replacement Gate for Reliable 30 nm Pitch Scaled 3D NAND Flash. IMW 2024: 1-4
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