"Revealing stresses for plasma induced damage detection in thick oxides."

Daniel Beckmeier et al. (2022)

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DOI: 10.1109/IRPS48227.2022.9764476

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Daniel Beckmeier, Jifa Hao, Jake Choi, Matt Ring:
Revealing stresses for plasma induced damage detection in thick oxides. IRPS 2022: 1-6

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