"Device performance analysis on 20nm technology thin wafers in a 3D package."

Sukeshwar Kannan et al. (2015)

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DOI: 10.1109/IRPS.2015.7112735

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Sukeshwar Kannan, Rahul Agarwal, Arnaud Bousquet, Geetha Aluri, Hui-Shan Chang:
Device performance analysis on 20nm technology thin wafers in a 3D package. IRPS 2015: 4

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