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"Reliability Modeling of Middle-Of-Line Interconnect Dielectrics in ..."
Rahim Kasim et al. (2023)
- Rahim Kasim, Cheyun Lin, Christopher Perini, James Palmer, N. Gilda, S. Imam, Justin R. Weber, C. Wallace, Jeffery Hicks:
Reliability Modeling of Middle-Of-Line Interconnect Dielectrics in Advanced process nodes. IRPS 2023: 1-8
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