"A Novel Quantitative Model for Combination Effects of Hydrogen and Process ..."

Dongjin Lee et al. (2024)

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DOI: 10.1109/IRPS48228.2024.10529490

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-29

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Dongjin Lee, Yunjo Lee, Soyeong Na, KangOh Yun, Sungkweon Baek, Jaeduk Lee, Jaehoon Jang, Jaihyuk Song:
A Novel Quantitative Model for Combination Effects of Hydrogen and Process Heat on Peripheral Transistors in 3D-NAND Flash Memory. IRPS 2024: 68

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