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"Study on mechanism of thermal curing in ultra-thin gate dielectrics."
Yuichiro Mitani, Yusuke Higashi, Yasushi Nakasaki (2018)
- Yuichiro Mitani, Yusuke Higashi
, Yasushi Nakasaki:
Study on mechanism of thermal curing in ultra-thin gate dielectrics. IRPS 2018: 3
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