"Reliability issues of gate oxides and $p-n$ junctions for vertical GaN ..."

Tetsuo Narita et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10118047

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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Tetsuo Narita, Daigo Kikuta, Kenji Ito, Tomoyuki Shoji, Tomohiko Mori, Satoshi Yamaguchi, Yasuji Kimoto, Kazuyoshi Tomita, Masakazu Kanechika, Takeshi Kondo, Tsutomu Uesugi, Jun Kojima, Jun Suda, Yoshitaka Nagasato, Satoshi Ikeda, Hiroki Watanabe, Masayoshi Kosaki, Tohru Oka:
Reliability issues of gate oxides and $p-n$ junctions for vertical GaN metal-oxide-semiconductor field-effect transistors (Invited). IRPS 2023: 1-10

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