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"Intrinsic Reliability of BEOL interlayer dielectric."

James Palmer et al. (2021)

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DOI: 10.1109/IRPS46558.2021.9405089

access: closed

type: Conference or Workshop Paper

metadata version: 2021-05-20

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  dblp key:
  - conf/irps/PalmerZWLPK21
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  persistent URL:
  - https://dblp.org/rec/conf/irps/PalmerZWLPK21
James Palmer, Galor Zhang, Justin R. Weber, Cheyun Lin, Christopher Perini, Rahim Kasim:
Intrinsic Reliability of BEOL interlayer dielectric. IRPS 2021: 1-2

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