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"Bilayer Passivation Film for Cu Interconnects on Si Interconnect Fabric."

Niloofar Shakoorzadeh, Amir Hanna, Subramanian S. Iyer (2019)

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DOI: 10.1109/IRPS.2019.8720532

access: closed

type: Conference or Workshop Paper

metadata version: 2023-01-09

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  dblp key:
  - conf/irps/ShakoorzadehHI19
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  - https://dblp.org/rec/conf/irps/ShakoorzadehHI19
Niloofar Shakoorzadeh, Amir Hanna, Subramanian S. Iyer:
Bilayer Passivation Film for Cu Interconnects on Si Interconnect Fabric. IRPS 2019: 1-5

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