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"Novel Oxide Top-Off Process Enabling Reliable PC-CA TDDB on IO Devices ..."
Tian Shen et al. (2019)
- Tian Shen, Abu Naser Zainuddin, Purushothaman Srinivasan, Zakariae Chbili, Kai Zhao, Patrick Justison:
Novel Oxide Top-Off Process Enabling Reliable PC-CA TDDB on IO Devices with Self Aligned Contact. IRPS 2019: 1-5
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