"Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate ..."

Tian-Li Wu et al. (2015)

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DOI: 10.1109/IRPS.2015.7112769

access: closed

type: Conference or Workshop Paper

metadata version: 2024-05-07

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Tian-Li Wu, Denis Marcon, Brice De Jaeger, Marleen Van Hove, Benoit Bakeroot, Steve Stoffels, Guido Groeseneken, Stefaan Decoutere, Robin Roelofs:
Time dependent dielectric breakdown (TDDB) evaluation of PE-ALD SiN gate dielectrics on AlGaN/GaN recessed gate D-mode MIS-HEMTs and E-mode MIS-FETs. IRPS 2015: 6

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