"Insights into metal drift induced failure in MOL and BEOL."

Chen Wu et al. (2018)

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DOI: 10.1109/IRPS.2018.8353551

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-01

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  - conf/irps/WuPLLCTC18
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Chen Wu, O. Varela Pedreira, Alicja Lesniewska, Yunlong Li, Ivan Ciofi, Zsolt Tökei, Kris Croes:
Insights into metal drift induced failure in MOL and BEOL. IRPS 2018: 3

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