"Semantic Autoencoder for Modeling BEOL and MOL Dielectric Lifetime ..."

Weiman Yan et al. (2023)

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DOI: 10.1109/IRPS48203.2023.10117878

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-24

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Weiman Yan, Ernest Wu, Alexander G. Schwing, Elyse Rosenbaum:
Semantic Autoencoder for Modeling BEOL and MOL Dielectric Lifetime Distributions. IRPS 2023: 1-9

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