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"Design, fabrication and modeling of microbeam structures for gas sensor ..."
Ioana Voiculescu, Mona E. Zaghloul, R. Andrew McGill (2003)
- Ioana Voiculescu, Mona E. Zaghloul, R. Andrew McGill:
Design, fabrication and modeling of microbeam structures for gas sensor applications in CMOS technology. ISCAS (3) 2003: 922-925
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