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"Design, fabrication and modeling of microbeam structures for gas sensor ..."

Ioana Voiculescu, Mona E. Zaghloul, R. Andrew McGill (2003)

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DOI: 10.1109/ISCAS.2003.1205171

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Ioana Voiculescu, Mona E. Zaghloul, R. Andrew McGill:
Design, fabrication and modeling of microbeam structures for gas sensor applications in CMOS technology. ISCAS (3) 2003: 922-925

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