"A Comparative Study on Front-Side, Buried and Back-Side Power Rail ..."

Sandra Maria Shaji et al. (2023)

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DOI: 10.1109/ISLPED58423.2023.10244504

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-25

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Sandra Maria Shaji, Lingjun Zhu, Jun-Sik Yoon, Sung Kyu Lim:
A Comparative Study on Front-Side, Buried and Back-Side Power Rail Topologies in 3nm Technology Node. ISLPED 2023: 1-6

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