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"A Machine Learning Based Framework for Sub-Resolution Assist Feature ..."

Xiaoqing Xu et al. (2016)

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DOI: 10.1145/2872334.2872357

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-21

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  - conf/ispd/XuMNKKP16
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Xiaoqing Xu, Tetsuaki Matsunawa, Shigeki Nojima, Chikaaki Kodama, Toshiya Kotani, David Z. Pan:
A Machine Learning Based Framework for Sub-Resolution Assist Feature Generation. ISPD 2016: 161-168

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