"Efficient Full-Chip Yield Analysis Methodology for OPC-Corrected VLSI Designs."

Valery Axelrad et al. (2000)

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DOI: 10.1109/ISQED.2000.838922

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Valery Axelrad, Nicolas B. Cobb, M. O'Brien, Thuy Do, Tom Donnelly, Yuri Granik, Emile Y. Sahouria, Victor Boksha, Artur Balasinski:
Efficient Full-Chip Yield Analysis Methodology for OPC-Corrected VLSI Designs. ISQED 2000: 461-466

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