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"Metal Inter-layer Via Keep-out-zone in M3D IC: A Critical Process-aware ..."
Madhava Sarma Vemuri, Umamaheswara Rao Tida (2023)
- Madhava Sarma Vemuri, Umamaheswara Rao Tida:
Metal Inter-layer Via Keep-out-zone in M3D IC: A Critical Process-aware Design Consideration. ISQED 2023: 1-8
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