![](https://dblp.org/img/logo.ua.320x120.png)
![](https://dblp.org/img/dropdown.dark.16x16.png)
![](https://dblp.org/img/peace.dark.16x16.png)
Остановите войну!
for scientists:
![search dblp search dblp](https://dblp.org/img/search.dark.16x16.png)
![search dblp](https://dblp.org/img/search.dark.16x16.png)
default search action
"1024 3D-Stacked Monolithic NEMS Array with 375μm20.5mW ..."
Gérard Billiot et al. (2022)
- Gérard Billiot, Paul Mattei, Bogdan Vysotskyi, Adrien Reynaud
, Louis Hutin, Christophe Plantier, Emmanuel Rolland, Marc Gely, Giulia Usai, Claude Tabone, Gaël Pillonnet
, Stéphanie Robinet, Sébastien Hentz:
1024 3D-Stacked Monolithic NEMS Array with 375μm20.5mW 0.28ppm Frequency Deviation Pixel-level Readout for Zeptogram Gravimetric Sensing. ISSCC 2022: 1-3
![](https://dblp.org/img/cog.dark.24x24.png)
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.