"Influence of target-target distance for composition distribution in new ..."

Takuya Maetani et al. (2014)

> Home

Details and statistics

DOI: 10.1109/MHS.2014.7006100

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/mhs/MaetaniNSH14
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/mhs/MaetaniNSH14
Takuya Maetani, Yutaka Nakamitsu, Junpei Sakurai, Seiichi Hata:
Influence of target-target distance for composition distribution in new facing targets sputtering. MHS 2014: 1-3

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.