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"MEMS components with perfectly protected edges and corners in Si{110} wafers."
Prem Pal, Kazuo Sato, Hirotaka Hida (2011)
- Prem Pal, Kazuo Sato, Hirotaka Hida:
MEMS components with perfectly protected edges and corners in Si{110} wafers. MHS 2011: 55-59
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