"A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke ..."

Ssu-Han Chen, Aron Michael, Chee Yee Kwok (2018)

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DOI: 10.1109/NEMS.2018.8556979

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Ssu-Han Chen, Aron Michael, Chee Yee Kwok:
A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage. NEMS 2018: 199-203

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