"Out-of-plane platforms with bi-directional thermal bimorph actuation for ..."

David Conchouso et al. (2015)

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DOI: 10.1109/NEMS.2015.7147503

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-19

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David Conchouso, Arpys Arevalo, David Castro, Ian G. Foulds:
Out-of-plane platforms with bi-directional thermal bimorph actuation for transducer applications. NEMS 2015: 608-612

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