"Characterization of an Asymmetrical Capacitive MEMS Tilt Sensor."

Yang Gao et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451287

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-13

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Yang Gao, Xiaopeng Zhang, Yonghong Qi, H. Zhang, Maeda Ryutaro, Zhuangde Jiang, Xueyong Wei:
Characterization of an Asymmetrical Capacitive MEMS Tilt Sensor. NEMS 2021: 1660-1663

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