"Integration the back-side inclined exposure technology to fabricate the ..."

Kuo-Yung Hung et al. (2012)

> Home

Details and statistics

DOI: 10.1109/NEMS.2012.6196737

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/HungTLC12
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/HungTLC12
Kuo-Yung Hung, Yi-Wei Tsai, Chun-Fu Lee, Yi-Hao Chu:
Integration the back-side inclined exposure technology to fabricate the 45° k-type prism with nanometer roughness. NEMS 2012: 120-124

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.