"An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ..."

Shimin Jiao et al. (2023)

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DOI: 10.1109/NEMS57332.2023.10190865

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-14

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Shimin Jiao, Hao Ouyang, Ziqiang Qu, Qiu Wang, Huafeng Liu, Liang Cheng Tu:
An Opto-mechanical MEMS Accelerometer with Noise Floor of 40 ng/Hz^1/2. NEMS 2023: 140-143

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