"A large size MEMS scanning mirror for speckle reduction application."

Fanya Li et al. (2017)

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DOI: 10.1109/NEMS.2017.8017080

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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Fanya Li, Jiahui He, Wenjiang Shen, Peng Zhou, Huijun Yu, Fei Ma:
A large size MEMS scanning mirror for speckle reduction application. NEMS 2017: 539-543

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