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"Design of a novel electrothermal actuator for integrated MEMS ..."

Xiuyuan Li, Yulong Zhao, Tengjiang Hu (2015)

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DOI: 10.1109/NEMS.2015.7147374

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Xiuyuan Li, Yulong Zhao, Tengjiang Hu:
Design of a novel electrothermal actuator for integrated MEMS safety-and-arming devices. NEMS 2015: 63-66

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