"The study of compensative structure assisted convex and concave corner ..."

Yu-Hsin Lin et al. (2015)

> Home

Details and statistics

DOI: 10.1109/NEMS.2015.7147475

access: closed

type: Conference or Workshop Paper

metadata version: 2020-09-14

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/LinCCHTCYHH15
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/LinCCHTCYHH15
Yu-Hsin Lin, Yuan-Chieh Cheng, Nien-Nan Chu, Wensyang Hsu, Yu-Hsiang Tang, Po-Li Chen, Chih-Chung Yang, Ming-Hua Hsiao, Chien-Nan Hsiao:
The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE). NEMS 2015: 491-493

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.