"A robust triangular-electrode based capacitive detection method for MEMS ..."

Yiyu Lin et al. (2017)

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DOI: 10.1109/NEMS.2017.8017012

access: closed

type: Conference or Workshop Paper

metadata version: 2017-09-07

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Yiyu Lin, Wei Ma, Siqi Liu, Xudong Zheng, Zhonghe Jin:
A robust triangular-electrode based capacitive detection method for MEMS gyroscopes. NEMS 2017: 226-230

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