"SOI-based capacitive micromechanical resonator with submicron gap-spacing."

Yi Liu, Yaquan Tang, Xiaomei Yu (2009)

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DOI: 10.1109/NEMS.2009.5068542

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Yi Liu, Yaquan Tang, Xiaomei Yu:
SOI-based capacitive micromechanical resonator with submicron gap-spacing. NEMS 2009: 130-133

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