"A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene."

Joost Romijn et al. (2018)

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DOI: 10.1109/NEMS.2018.8556902

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Joost Romijn, Sten Vollebregt, Robin J. Dolleman, Manvika Singh, Herre S. J. van der Zant, Peter G. Steeneken, Pasqualina M. Sarro:
A Miniaturized Low Power Pirani Pressure Sensor Based on Suspended Graphene. NEMS 2018: 11-14

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