"Micro process engineering of freestanding silicon fluidic channels with ..."

R. Roth et al. (2013)

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DOI: 10.1109/NEMS.2013.6559864

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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R. Roth, Keith Cobry, G. Lenk, Peter Woias:
Micro process engineering of freestanding silicon fluidic channels with integrated platinum thermistors for obtaining heat transfer correlations. NEMS 2013: 879-882

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