"Scaling analysis of capacitive MEMS microphones considering residual stress."

Kui Song et al. (2016)

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DOI: 10.1109/NEMS.2016.7758228

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Kui Song, Weiguan Zhang, Wei Xu, Yi-Kuen Lee:
Scaling analysis of capacitive MEMS microphones considering residual stress. NEMS 2016: 184-187

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