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"Fabrication and characterization of lithium-niobate thin film MEMS ..."
Wei-Siang Tan et al. (2016)
- Wei-Siang Tan, Grace W. Fang, Gayathri Pillai, Cheng-Chi Chen, Chao-Yu Chen, Chi-Hang Chin, Sheng-Shian Li:
Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators. NEMS 2016: 516-519
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