"Fabrication and evaluation of silicon micromechanical resonator using ..."

Nguyen Van Toan et al. (2014)

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DOI: 10.1109/NEMS.2014.6908747

access: closed

type: Conference or Workshop Paper

metadata version: 2023-11-12

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Nguyen Van Toan, Tomohiro Kubota, Halubai Seknar, Seiji Samukawa, Takahito Ono:
Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology. NEMS 2014: 1-5

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