"A novel bulk micromachined tunneling gyroscope."

Lingyun Wang et al. (2011)

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DOI: 10.1109/NEMS.2011.6017492

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Lingyun Wang, Yuanzhe Su, Yi Lei, Wenwang Li, Yifang Liu, Daoheng Sun:
A novel bulk micromachined tunneling gyroscope. NEMS 2011: 873-876

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