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"Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel ..."
Nan Wang et al. (2012)
- Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, Masayoshi Esashi:
Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch. NEMS 2012: 247-252
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