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"A single mask dry releasing process for making high aspect ratio ..."

Yumin Wei et al. (2010)

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DOI: 10.1109/NEMS.2010.5592579

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-10

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Yumin Wei, Xu Mao, Zhenchuan Yang, Guizhen Yan:
A single mask dry releasing process for making high aspect ratio soimemsdevices. NEMS 2010: 1040-1043

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