"An annealing process for mechanical strength improvement of Parylene ..."

Han Xu et al. (2017)

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DOI: 10.1109/NEMS.2017.8017109

access: closed

type: Conference or Workshop Paper

metadata version: 2020-01-08

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Han Xu, Wangzhi Dai, Yaoping Liu, Wengang Wu, Wei Wang:
An annealing process for mechanical strength improvement of Parylene micropore-arrayed membrane. NEMS 2017: 665-668

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