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"Design and simulation of two Z-axis microgyroscopes with different types ..."

Xin Yan, Lingjuan Che, Xuyuan Chen (2010)

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DOI: 10.1109/NEMS.2010.5592144

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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  - conf/nems/YanCC10
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Xin Yan, Lingjuan Che, Xuyuan Chen:
Design and simulation of two Z-axis microgyroscopes with different types of decoupled structures. NEMS 2010: 66-69

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