"A Surface-Micromachined Levitating MEMS Speaker."

Antoine Verreault, Paul-Vahé Cicek, Alexandre Robichaud (2022)

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DOI: 10.1109/NEWCAS52662.2022.9842083

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-11

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Antoine Verreault, Paul-Vahé Cicek, Alexandre Robichaud:
A Surface-Micromachined Levitating MEMS Speaker. NEWCAS 2022: 134-138

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