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"Multiscale modelling of MEMS based Pirani gauges."

Prafullkrishna Dani, Jochen Franz, Joachim Knoch (2023)

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DOI: 10.1109/SMACD58065.2023.10192174

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-09

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  dblp key:
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Prafullkrishna Dani, Jochen Franz, Joachim Knoch:
Multiscale modelling of MEMS based Pirani gauges. SMACD 2023: 1-4

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