"SCLP Software for Thermal Process Control of Nanowire Fabrication and ..."

Norma Alias et al. (2014)

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DOI: 10.3233/978-1-61499-434-3-736

access: closed

type: Conference or Workshop Paper

metadata version: 2017-06-05

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Norma Alias, Noriza Satam, Mohd Shahizan Othman, Che Rahim Che Teh, Maizatul Nadirah Mustaffa, Hafizah Farhah Saipan Saipol:
SCLP Software for Thermal Process Control of Nanowire Fabrication and Multilayer Nanochip System. SoMeT 2014: 736-750

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