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"Modeling of High Frequency Out-of-Plane Single Axis MEMS Capacitive ..."
Prashant Singh et al. (2013)
- Prashant Singh
, Pooja Srivastava, Ram Mohan Verma, Saurabh Jaiswal:
Modeling of High Frequency Out-of-Plane Single Axis MEMS Capacitive Accelerometer. VDAT 2013: 249-256
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