"Self-dependent Equivalent Circuit Modeling of Electrostatic Comb ..."

Toshiyuki Tsuchiya et al. (2011)

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DOI: 10.1007/978-3-642-32770-4_6

access: open

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata:
Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS. VLSI-SoC (Selected Papers) 2011: 94-109

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