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"Strategy for 3D Ferroelectric Transistor: Critical Surface Orientation ..."

Song-Hyeon Kuk et al. (2023)

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DOI: 10.23919/VLSITECHNOLOGYANDCIR57934.2023.10185431

access: closed

type: Conference or Workshop Paper

metadata version: 2023-07-28

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Song-Hyeon Kuk, Jae-Hoon Han, Bong Ho Kim, Joon Pyo Kim, Sang-Hyeon Kim:
Strategy for 3D Ferroelectric Transistor: Critical Surface Orientation Dependence of HfZrOx on Si. VLSI Technology and Circuits 2023: 1-2

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